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产品规格

Spray Coating- DOMINUS Coater ST22i

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The future technology in the semiconductor industry and production-Spray Coating System and Hotplate within process:

DOMINUS Coater - OPTIcoat ST 22i

  • Stand - Alone Spray Coating System for Wafers up to Ø 8” (Ø 200 mm) and Substrates up to 6” x 6” (150 mm x 150 mm)

System consists of:

  • Stand - Alone cabinet with all process modules integrated
  • Dominus spray coater process chamber with safety door
  • Hotplate OPTIhot HB 20+ with lifting pins for 2” up to 8”
  • Including one programmable media arm with micro nozzle
  • Programmable Nozzle (Needle adjustment)
  • Emergency Stop Button
  • Input display unit with touch screen
  • USB 2.0 port for data exchange
  • Including software for PC / Notebook – For more comfortable recipe writing and storage
  • Including an ENGLISH manual on standard paper and a CD-ROM
  • Price without installation and training
  • Requires at least one chuck (Not included !)
     

Technical data:

  • Voltage: UAC= 3 x 400 V / N/PE/50 Hz /16A
  • Substrate size:Up to Ø 8” (Ø 200mm) or 6” x 6” (150mm x 150mm)
  • Chamber /HP exhaust #1+2: 2 x outer diameter OD 110 mm, each 200m3/h
  • Cabinet exhaust: Outer diameter OD 110 mm, 200m3/h
  • Controller exhaust: Outer diameter OD 110 mm, 200m3/h
  • Drain: 5 liter waste tank and high-level sensor inside the cabinet
  • Compressed air: Clean Dry Air (CDA) 8 ± 2 bar
  • Vacuum: -0.8 ± 0.2 bar
  • Nitrogen (N2) Optional: 4.5 ± 0.5 bar
  • CE marked system

 

Hotplate:

  • Temperature range: Up to 250°C - Adjustable in 0.1°C steps
  • Hotplate time: 1 up to 999 s - Adjustable in 0.1 s steps
  • Proximity: Programmable in 0.1 mm steps
  • For Wafer: Up to Ø 8” (Ø 200 mm)
  • For Substrate:Up to 6” x 6” (150 mm x 150 mm)
  • Lifting pins: For Ø 4” up to Ø 12”
  • Compressed air: Clean Dry Air (CDA) 8 ± 2 bar
  • Vacuum: -0.8 ± 0.2 bar
  • Nitrogen (N2) Optional: 4.5 ± 0.5 bar