ATMgroup

产品规格

Spin coating and Cleaning- OPTIspin ST22+

产品编号: 51-0002-05-00

The future technology in the semiconductor industry and production-
Stand alone spinner module for coating; cleaning, developing and hotplate within process

OPTIspin ST 22+

  • Stand - Alone Spinner System for Coating, Cleaning or Developing applications with hotplate for wafer up to Ø 8" (Ø 200 mm) and substrates up to 6" x 6" (150 mm x 150 mm)

System consists of:

  • Stand - Alone cabinet with all process modules integrated
  • Spinner system with process bowl cover (hardware interlock secured)
  • Multi piece process bowl (easily dismountable for cleaning purposes)with splash ring
  • Hotplate OPTIhot HB 20+
  • With programmable lifting pins (proximity) for 2" - 8" wafer
  • Programmable Nitrogen (N2) blow
  • Input display unit with touch for each system
  • USB 2.0 port for data exchange
  • Including software for PC / Notebook - For more comfortable recipe writing and storage
  • Including an ENGLISH manual on standard paper and a CD-ROM
  • Price without installation and training
  • Requires at least one chuck (Not included !)

Technical Data:

  • Voltage: UAC= 3 x 400 V / N / PE / 50 Hz (60 Hz) / 16A
  • Substrate size: Up to Ø 8" (Ø 200 mm) or 6" x 6" (150 mm x 150 mm)
  • Process exhaust: Outer diameter OD 110 mm, 200m3/h
  • Cabinet exhaust #1: Outer diameter OD 110 mm, 200m3/h
  • Cabinet / HP exhaust #2: Outer diameter OD 110 mm, 200m3/h
  • Compressed air: Clean Dry Air (CDA) 8 ± 2 bar
  • Vacuum: -0.8 ± 0.2 bar
  • Nitrogen (N2): 4.0 ± 0.5 bar
  • CE marked system

Chucks: Option

Nozzle: Option

Hotplate: Option