ATMgroup

产品规格

Spin Coating and Cleaning- OPTIspin ST23

产品编号: 51-0002-06-00

The future technology in the semiconductor industry and production-
Stand alone spinner module for coating; cleaning, developing, hotplate and HMDS within process

OPTIspin ST 23

  • Stand - Alone Spinner System for Coating, Cleaning or Developing applications with hotplate and HMDS (HexaMethylDiSilazan - C6H19NSi2) hotplate for wafer up to Ø 8" (Ø 200 mm) and substrates up to 6" x 6" (150 mm x 150 mm)

System consists of:

  • Stand - Alone cabinet with all process modules integrated
  • Spinner system with process bowl cover (hardware interlock secured)
  • Multi piece process bowl (easily dismountable for cleaning purposes) with splash ring
  • Hotplate OPTIhot HB 20 with lifting pins for 2" up to 8"
  • Vapor prime HMDS (HexaMethylDiSilazan) hotplate OPTIhot VB 20
  • Input display unit with touch for spin coater and HMDS HP
  • Temperature controller and timer for hotplate
  • USB 2.0 port for data exchange
  • Including software for PC / Notebook - For more comfortable recipe writing and storage
  • Including an ENGLISH manual on standard paper and a CD-ROM
  • Price without installation and training
  • Requires at least one chuck (Not included !)

Technical Data:

  • Voltage: UAC= 3 x 400 V / N / PE / 50 Hz (60 Hz) / 16A
  • Substrate size: Up to Ø 8" (Ø 200 mm) or 6" x 6" (150 mm x 150 mm)
  • Process exhaust: Outer diameter OD 110 mm, 200m3/h
  • Cabinet exhaust #1: Outer diameter OD 110 mm, 200m3/h
  • Cabinet / HP exhaust #2: Outer diameter OD 110 mm, 200m3/h
  • Process exhaust HMDS: Outer diameter OD 110 mm, 200m3/h
  • Cabinet exhaust HMDS: Outer diameter OD 110 mm, 200m3/h
  • Compressed air: Clean Dry Air (CDA) 8 ± 2 bar
  • Vacuum: -0.8 ± 0.2 bar
  • Nitrogen (N2): 4.0 ± 0.5 bar
  • CE marked system

Chucks: Option

Dispense: Option

Nozzle: Options

Hotplate: Option