ATMgroup

产品规格

Spin Coating- OPTIcoat ST60

产品编号: 51-0003-01-12

The future technology in the semi conductor industry and production-
Coating System with a process optimized covered chuck technology:

OPTIcoat ST 60

  • Stand - Alone Spin Coating System with "Covered Chuck"
    technology for Wafers up to Ø 22" (Ø 560 mm) and substrates
    up to 16" x 16" (400 mm x 400 mm) for covered chuck spinning

System consists of:

  • Stand - Alone cabinet with all process modules integrated
  • Spinner System with Covered Chuck technology and automatic substrate pin lift
  • Multi piece process bowl with splash ring
  • Input display unit with touch for each system
  • Including software for PC / Notebook - For more comfortable recipe writing and storage
  • Including an ENGLISH manual on standard paper and a CD-ROM
  • Price without installation and training
  • Requires at least one chuck (Not included !)

Technical data:

  • Voltage: UAC= 3 x 400 V / N / PE /50 Hz (60 Hz) / 16A
  • Motor speed: 1 up to 2,500 rpm - Adjustable in 1 rpm steps (depends on substrate weight and size)
  • Motor acceleration ramp: 1 up to 500 rpm/s - Adjustable in 1 rpm/s steps (depends on substrate / chuck weight and size)
  • Spinning time: 1 up to 999 s - Adjustable in 0.1 s steps
  • Substrate size: Up to Ø 22" (Ø 560 mm) or 16" x 16" (400 mm x 400 mm)
  • Process bowl: Standard made of Polypropylene (PP)
  • Process exhaust#1: Outer diameter OD 110 mm, 200m3/h
  • Process exhaust#2+3: Outer diameter OD 110 mm, each 200m3/h
  • Cabinet exhaust: Outer diameter OD 110 mm, 200m3/h
  • Controller exhaust: Outer diameter OD 110 mm, 200m3/h
  • Drain: 5 liter waste tank and high-level sensor
  • Compressed air: Clean Dry Air (CDA) 8 ± 2 bar
  • Vacuum: -0.8 ± 0.2 bar
  • Nitrogen (N2) Optional: 4.0 ± 0.5 bar
  • CE marked system