ATMgroup

产品规格

Hotplate HMDS- OPTIhot VB20

产品编号: 51-0004-05-00

The future technology in the semi conductor industry and production-
HMDS hotplate module for typical HMDS wafer priming and dehydration bake lithography applications:

OPTIhot VB 20

  • Bench Mounted HMDS (HexaMethylDiSilazan - C6H19NS 2)
    Vapor Prime Hotplate System for wafer up to Ø 8" (Ø 200 mm)
    and substrates up to 6" x 6" (150 mm x 150 mm) with
    programmable process parameter (HMDS, Nitrogen and Vacuum)

System consists of:

  • Hotplate System with vacuum chamber and cover
  • Process media dosing unit and controller
  • Input display unit with touch
  • Profiled and calibrated to Temperature Controller before shipment
  • Including software for PC / Notebook - For more comfortable
  • recipe writing and storage
  • Including an ENGLISH manual on standard paper and a CD-ROM
  • Price without installation and training

Technical data:

  • Voltage: UAC= 110 V / N / PE / 60 Hz / 16A or UAC= 230 V / N / PE / 50 Hz / 16A
  • Temperature range: Up to 200°C - Adjustable in 0.1°C steps
  • Hotplate time: 1 up to 999 s - Adjustable in 0.1 s steps
  • Programmable process: HMDS, Nitrogen (N2), Vacuum parameter
  • Substrate size: Up to Ø 8" (Ø 200 mm) or 6" x 6" (150 mm x 150 mm)
  • Process exhaust: Outer diameter OD 38mm, 30m3/h
  • Compressed air: Clean Dry Air (CDA) 8 ± 2 bar
  • Vacuum: -0.8 ± 0.2 bar
  • Nitrogen (N2): 4.0 ± 0.5 bar
  • CE marked system

Options

  • "5 liter HMDS / N2 bubbler tank system stainless steel tank complete with pressure regulator and tubing exhaust for venting pressure tank system or media cabinet necessary"