ATMgroup

产品规格

Spin Coating- OPTIcoat ST30

产品编号: 51-0003-01-09

The future technology in the semiconductor industry and production-
Stand-Alone Spin Coating System "Covered Chuck" within process:

OPTIcoat ST 30

  • Stand - Alone Spin Coating System with "Covered Chuck"
    technology for Wafers up to Ø 12" (Ø 300 mm) and substrates
    up to 9" x 9" (225 mm x 225 mm), for traditional open bowl or
    covered chuck spinning

System consists of:

  • Stand - Alone cabinet with all process modules integrated
  • Spinner System with "Covered Chuck" technology and automatic substrate pin lift
  • Multi piece process bowl (easily dismountable for cleaning purposes) with splash ring
  • Input display unit with touch
  • Including software for PC / Notebook - For more comfortable recipe writing and storage
  • Including an ENGLISH manual on standard paper and a CD-ROM
  • Price without installation and training
  • Requires at least one chuck (Not included !)



Technical data:

  • Voltage: UAC= 3 x 400 V / N/PE/50 Hz (60Hz)/16A
  • Motor-Speed: 1 up to 6,000rpm in 1rpm steps
  • Motor-Acceleration ramp: 1 up to 3,000 rpm/sec in steps 1rpm/sec
  • Spinning time: 1 up to 999 s - Adjustable in 0.1 s steps
  • Substrate size: Up to Ø 12" (Ø 300 mm) or 9" x 9" (225 mm x 225 mm)
  • Process bowl: Standard made of Polypropylene (PP)
  • Process exhaust: Outer diameter Ø 110 mm, 200 m3/h
  • Cabinet exhaust: Outer diameter Ø 110 mm, 200 m3/h
  • Drain: Standard 5 liter PEHD waste tank with high-level sensor
  • Compressed air: Clean Dry Air (CDA) 8 ± 2 bar
  • Vacuum: -0.8 ± 0.2 bar
  • Nitrogen (N2), optional: 4.0 ± 0.5 bar
  • CE marked system

Chuck: Option

Dispense: Option

Nozzle: Option