ATMgroup

Semiconductor

Innovations in Semiconductor Technology

The ATMgroup is prepared to share its experience with the semiconductor industry and its sound top-grade know-how of engineering, which it has been collecting over the years.

ATM is one of the world's leading manufacturers of automated processing units and manual modules for lithographic processing as well as for lithography-linked procedures as e.g. wet-processes for developing, cleaning or etching.

Standardized resp. Customized Solutions

Our product range comprises everything: from laboratory equipment to fully automated processing devices for various throughputs.

ATM's modular unit design is one of the unique problem solutions ATM offers due to our innovative engineering and excellent know-how of a variety of clean-room assembly procedures. Our product portfolio contains modules from laboratory scale up to fully automated assembly units for processing wafers or substrates for the semiconductor industry, opto-electronics, MEMs, photovoltaics, display technology and sensor systems.

 
Automatic Process Equipment

Maximus 804

Automatic spinner for Coating including process and micro cluster system
51-005-02-00
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Maximus 804 Lift-Off

Automatic lift-off cleaning spinner system including process and micro cluster system
51-005-02-LO
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Maximus 806

Automatic spinner for Coating including process and micro cluster system
51-0005-04-00
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Maximus 1203

Automatic spinner for Coating including process and micro cluster system
51-0005-06-00
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MAXIMUS 6003

Automatic spinner for Coating including process and micro cluster system
51-0005-05-00
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Laboratory RD Equipment

Spin Coating and Cleaning- OPTIspin SB20

Spin coating and cleaning system including process
51-0002-01-00
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Spin coating and Cleaning-OPTIspin ST20

Stand alone spinner system including process
51-0002-03-00
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Spin Coating and Cleaning-OPTIspin ST22

Stand alone spinner for coating and cleaning including process
51-0002-04-00
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Spin coating and Cleaning- OPTIspin ST22+

Stand alone spinner system for coating and cleaning including process
51-0002-05-00
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Spin Coating and Cleaning- OPTIspin ST23

Stand alone spinner system for coating and cleaning including process
51-0002-06-00
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Spin Coating and Cleaning- OPTIspin ST23+

Stand alone spinner system for coating and cleaning including process
51-0002-07-00
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Spin Coating- OPTIspin SB30

Bench mounted spinner system including process
51-0002-08-00
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Spin Coating- OPTIspin ST30

Stand alone spinner system for Coating including process
51-0002-09-00
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Spin Coating- OPTIspin ST32

Stand alone spinner for coating including process
51-0002-10-00
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Spin Coating- OPTIspin ST32+

Stand alone spinner system for Coating including process
51-0002-11-00
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Spin Coating- OPTIcoat SB20

Bench mounted spinner system including process
51-0003-01-00
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Spin Coating- OPTIcoat ST20

Stand alone spinner for coating including process
51-0003-01-02
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Spin Coating- OPTIcoat ST22

Stand alone spinner for coating including process
51-0003-01-03
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Spin Coating- OPTIcoat ST22+

Stand alone spinner for coating including process
51-0003-01-04
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Spin Coating- OPTIcoat ST23

Stand alone spinner for coating including process
51-0003-01-05
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Spin Coating- OPTIcoat ST23+

Stand alone spinner for coating including process
51-0003-01-06
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Spin Coating- OPTIcoat SB30

Bench mounted spinner system including process
51-0003-01-07
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Spin Coating- OPTIcoat ST30

Stand alone spinner for coating including process
51-0003-01-09
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Spin Coating- OPTIcoat ST32

Stand alone spinner for coating including process
51-0003-01-10
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Spin Coating- OPTIcoat ST32+

Stand alone spinner for coating including process
51-0003-01-11
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Spin Coating- OPTIcoat ST60

Stand alone spinner for coating including process
51-0003-01-12
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Spin Coating- OPTIcoat ST75

Stand alone spinner for coating including process
51-0003-01-13
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Spray Coating- DOMINUS Coater ST 20i

Stand alone spray coating systemfor Coating including process
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Spray Coating- DOMINUS Coater ST22i

Stand alone spray coating system for coating including process
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Spray Coating- DOMINUS Coater ST30i

Stand alone spray coating system for coating including process
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Spin Wet- OPTIwet SB 30 extended

Stand alone spinner for wet process
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Spin Wet- OPTIwet ST 30

Stand alone spinner for wet process
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Spin Wet- OPTIwet ST 60

Stand alone spinner for wet process
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Spin Wet- OPTIwet ST 75

Stand alone spinner for wet process
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Hotplate- OPTIhot HB20

Bench mounted hotplate system including process
51-0004-01-00
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Hotplate- OPTIhot SHT20

Stand alone hotplate
51-0004-02-00
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Hotplate- OPTIhot HB20+

Bench mounted hotplate system including process
51-0004-03-00
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Hotplate- OPTIhot SHT20+

Stand alone hotplate
51-0004-04-00
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Hotplate HMDS- OPTIhot VB20

Bench mounted HMDS hotplate
51-0004-05-00
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Hotplate HMDS- OPTIhot SVT20

Stand alone hotplate HMDS
51-0004-06-00
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Hotplate- OPTIhot HB30+

Bench mounted hotplate system including process
51-0004-07-00
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Hotplate- OPTIhot SHT30+

Stand alone hotplate
51-0004-08-00
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Low cost Equipment

Spinner module- primus SB15

Spinner module primus SB15 including process
51-0001-01-00
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Spinner module- primus STT15

Spinner module- primus STT15 including process
51-0001-02-00
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