ATMgroup

半导体技术

半导体技术的创新

ATM集团随时乐意与您分享我们在半导体行业的多年经验。

ATM集团是半导体行业中生产自动设备和半自动设备的领军企业之一,同时也供应与光刻有关的设备,例如光阻、清洗、刻蚀等。

标准规格,特定的解决方案

产品范围覆盖广:从实验室设备到自动化设备;从小型设备至中型设备。

ATM独有的模块化设备允许您根据不同需求增加不同的模块单元。我们的产品组合包括适用于实验室的小型设备至适用于硅片生产和基板生产的全自动大型设备。我们的设备广泛用于多个领域,例如,半导体行业、光伏产业、微机电行业、显示技术和智能传感系统等。

 
自动化设备

Maximus 804

Automatic spinner for Coating including process and micro cluster system
51-005-02-00
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Maximus 804 Lift-Off

Automatic lift-off cleaning spinner system including process and micro cluster system
51-005-02-LO
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Maximus 806

Automatic spinner for Coating including process and micro cluster system
51-0005-04-00
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Maximus 1203

Automatic spinner for Coating including process and micro cluster system
51-0005-06-00
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MAXIMUS 6003

Automatic spinner for Coating including process and micro cluster system
51-0005-05-00
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实验室设备

Spin Coating and Cleaning- OPTIspin SB20

Spin coating and cleaning system including process
51-0002-01-00
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Spin coating and Cleaning-OPTIspin ST20

Stand alone spinner system including process
51-0002-03-00
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Spin Coating and Cleaning-OPTIspin ST22

Stand alone spinner for coating and cleaning including process
51-0002-04-00
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Spin coating and Cleaning- OPTIspin ST22+

Stand alone spinner system for coating and cleaning including process
51-0002-05-00
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Spin Coating and Cleaning- OPTIspin ST23

Stand alone spinner system for coating and cleaning including process
51-0002-06-00
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Spin Coating and Cleaning- OPTIspin ST23+

Stand alone spinner system for coating and cleaning including process
51-0002-07-00
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Spin Coating- OPTIspin SB30

Bench mounted spinner system including process
51-0002-08-00
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Spin Coating- OPTIspin ST30

Stand alone spinner system for Coating including process
51-0002-09-00
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Spin Coating- OPTIspin ST32

Stand alone spinner for coating including process
51-0002-10-00
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Spin Coating- OPTIspin ST32+

Stand alone spinner system for Coating including process
51-0002-11-00
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Spin Coating- OPTIcoat SB20

Bench mounted spinner system including process
51-0003-01-00
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Spin Coating- OPTIcoat ST20

Stand alone spinner for coating including process
51-0003-01-02
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Spin Coating- OPTIcoat ST22

Stand alone spinner for coating including process
51-0003-01-03
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Spin Coating- OPTIcoat ST22+

Stand alone spinner for coating including process
51-0003-01-04
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Spin Coating- OPTIcoat ST23

Stand alone spinner for coating including process
51-0003-01-05
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Spin Coating- OPTIcoat ST23+

Stand alone spinner for coating including process
51-0003-01-06
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Spin Coating- OPTIcoat SB30

Bench mounted spinner system including process
51-0003-01-07
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Spin Coating- OPTIcoat ST30

Stand alone spinner for coating including process
51-0003-01-09
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Spin Coating- OPTIcoat ST32

Stand alone spinner for coating including process
51-0003-01-10
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Spin Coating- OPTIcoat ST32+

Stand alone spinner for coating including process
51-0003-01-11
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Spin Coating- OPTIcoat ST60

Stand alone spinner for coating including process
51-0003-01-12
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Spin Coating- OPTIcoat ST75

Stand alone spinner for coating including process
51-0003-01-13
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Spray Coating- DOMINUS Coater ST 20i

Stand alone spray coating systemfor Coating including process
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Spray Coating- DOMINUS Coater ST22i

Stand alone spray coating system for coating including process
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Spray Coating- DOMINUS Coater ST30i

Stand alone spray coating system for coating including process
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Spin Wet- OPTIwet SB 30 extended

Stand alone spinner for wet process
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Spin Wet- OPTIwet ST 30

Stand alone spinner for wet process
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Spin Wet- OPTIwet ST 60

Stand alone spinner for wet process
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Spin Wet- OPTIwet ST 75

Stand alone spinner for wet process
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Hotplate- OPTIhot HB20

Bench mounted hotplate system including process
51-0004-01-00
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Hotplate- OPTIhot SHT20

Stand alone hotplate
51-0004-02-00
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Hotplate- OPTIhot HB20+

Bench mounted hotplate system including process
51-0004-03-00
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Hotplate- OPTIhot SHT20+

Stand alone hotplate
51-0004-04-00
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Hotplate HMDS- OPTIhot VB20

Bench mounted HMDS hotplate
51-0004-05-00
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Hotplate HMDS- OPTIhot SVT20

Stand alone hotplate HMDS
51-0004-06-00
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Hotplate- OPTIhot HB30+

Bench mounted hotplate system including process
51-0004-07-00
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Hotplate- OPTIhot SHT30+

Stand alone hotplate
51-0004-08-00
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低成本设备

Spinner module- primus SB15

Spinner module primus SB15 including process
51-0001-01-00
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Spinner module- primus STT15

Spinner module- primus STT15 including process
51-0001-02-00
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